De-Ionized (DI) water is ubiquitous within the Fab. Purity and consistency of DI is critical to manufacturing process. Urea is a known contaminant that is difficult to control and has large seasonal fluctuations. Normally stable at room temperature, Urea has a high conversion rate to Ammonia when boiled. DI water is often converted to steam and then injected into cleanroom air to control humidity. We will present data that shows that Urea converts to Ammonia during boiling.
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NANO Corporate Newsletter
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