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Two factors are critical to yield when manufacturing the oxide aperture in VCSELs: oxide growth rate and film quality. Oxide growth rate is limited by temperature and water vapor pressure while film quality is limited by contaminants. The RASIRC Steamer steam purification system provides an alternative to bubblers and vaporizers by increasing the partial pressure of water and improving water vapor purity. Using the RASIRC Steamer, VCSEL manufacturers should be able to increase yield over their existing process.
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