ULTRATHIN FILMS, 2011 . 284

TABLE 89 (CONTINUED) . 285

TABLE 89 (CONTINUED) . 286

TABLE 89 (CONTINUED) . 287

TABLE 89 (CONTINUED) . 288

TABLE 89 (CONTINUED) . 289

TABLE 89 (CONTINUED) . 290

TABLE 89 (CONTINUED) . 291

TRENDS BY PATENT CATEGORY 292

FIGURE 17 THIN AND ULTRATHIN FILMS: SHARES OF U.S.

PATENTS BY CATEGORY, 2011 (%) 292

FIGURE 17 (CONTINUED). 293

TRENDS BY DEPOSITION METHOD . 293

FIGURE 18 THIN AND ULTRATHIN FILMS: SHARES OF U.S.

PATENTS BY DEPOSITION METHOD, 2011 (%) 294

To order this report: Electronic Component and Semiconductor Industry: Global Markets, Technologies and Materials for Thin and Ultrathin Films

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