TABLE 10 KEY ADVANTAGES OF THE PVD EVAPORATION

PROCESS 46

Some Limitations of Evaporation 46

TABLE 11 MAJOR LIMITATIONS OF EVAPORATION 46

SPUTTERING OPERATIONS 47

TABLE 12 KEY ADVANTAGES OF SPUTTERING 48

Radio Frequency (RF) and Direct Current (DC) Diode

Sputtering 48

Magnetically Enhanced Sputtering 48

Magnetron Sputtering Can Produce High Rates 49

Reactive Sputtering 49

TABLE 13 MAJOR LIMITATIONS OF SPUTTERING 50

ION BEAM ASSISTED DEPOSITION 50

TABLE 14 ADVANTAGES/LIMITATIONS OF THE ION BEAM

ASSISTED DEPOSITION PROCESS 51

PULSED LASER DEPOSITION 52

Basic Components 52

TABLE 15 KEY ADVANTAGES OF PULSED LASER DEPOSITION 53

CATHODIC ARC DEPOSITION 53

Key Components 54

TABLE 16 ADVANTAGES AND LIMITATIONS OF THE CATHODIC

ARC PROCESS 55

ROLL COATING 55

TABLE 17 BASIC ADVANTAGES OF ROLL COATING 56

PVD EQUIPMENT CONFIGURATIONS 56

CLUSTER TOOLS 57

Technical Advantages 57

TABLE 18 TECHNICAL ADVANTAGES OF CLUSTER TOOLS 58

IN-LINE SYSTEMS 58

Advantages of In-Line Systems 59

TABLE 19 BASIC BENEFITS OF IN-LINE PVD SYSTEMS 59

TECHNOLOGY TRENDS IN PVD 60

NANOTECHNOLOGY OFFERS IMPROVEMENTS 60

PVD Has Had Success with Nanocoatings 60

NANOCOMPOSITES ARE ANOTHER CLASS OF COATINGS 61

TABLE 20 INDUSTRIAL APPLICATIONS OF NANOCOMPOSITES 61

CUSTOM-MADE PVD SYSTEMS 62

Twin Door Metallization Systems for the Automotive

Industry 62

LARGE AREA VACUUM COATER FOR TELESCOPE

MIRROR 62

ROTATABLE SPUTTER TARGETS FOR LARGE AREA GLASS

COATING 63

TABLE 21 APPLICATIONS OF A ROTATABLE SPUTTER TARGET

SYSTEM 63

LARGE AREA ROLL-TO-ROLL DEPOSITION 64

TABLE 22 MAJOR APPLICATIONS FOR LARGE AREA ROLL-TOROLL

DEPOSITION SYSTEMS 64

PERSPECTIVE ON TRADITIONAL AND EVOLVING

TECHNOLOGIES 65

INDUSTRY COMPETITIVENESS 65

PATENT ANALYSIS 66

SCOPE OF PATENT ACTIVITY 66

OUR FOCUS ON PATENTS 66

PATENTS BY TECHNICAL SUBJECT 67

TABLE 23 PVD PATENTS BY TECHNICAL CATEGORY, LATE 2009-

2011 67

PATENTS BY COMPANY 68

TABLE 24 PVD PATENTS BY COMPANY (TWO OR MORE PATENTS)

LATE 2009-2011 68

TABLE 24 (CONTINUED) 69

SAMPLE PATENT ABSTRACTS 69

Resputtering Process for Eliminating Dielectric Damage 70

Method for Magnetron Sputter Deposition 70

Methods and Apparatus for Engineering an Interface

Between a Diffusion Barrier Layer and a Seed Layer 70

Physical Vapor Deposition Plasma Reactor with Arcing

Suppression 71

Ionized Physical Vapor Deposition (iPVD) Process 71

Ionized Physical Vapor … (Continued) 72

CHAPTER SIX: THE PVD MARKET 73

INDUSTRY APPROACH 73

MARKET PERSPECTIVE 73

TABLE 25 ESTIMATED GLOBAL PHYSICAL VAPOR DEPOSITION

EQUIPMENT REVENUES AND MARKET SHARE, 2010-2016 ($

MILLIONS, SHARE %) 73

FIGURE 3 ESTIMATED GLOBAL PVD EQUIPMENT MARKET SHARE,

2010-2016 (%) 74

MARKET ANALYSIS 75

MEASUREMENT OBJECTIVES 75

Measurement Objectives (Continued) 76

CHAPTER SEVEN: PVD IN THE MICROELECTRONICS MARKET 77

PVD IN THE MICROELECTRONICS MARKET 77

WHAT ARE THE BASIC MICROELECTRONIC PRODUCTS? 78

TABLE 26 BASIC MICROELECTRONIC PRODUCTS THAT EMPLOY

THE PVD PROCESS 78

PRODUCT CHARACTERISTICS CONTINUE TO CHANGE 79

TABLE 27 CHARACTERISTICS OF INTEGRATED CIRCUITS 79

THE COMPETITIVENESS OF PVD IN MICROELECTRONICS 80

GLOBAL ECONOMIC CONDITIONS STILL IMPACTING PVD 80

TABLE 28 GLOBAL DEMAND FOR SEMICONDUCTORS THROUGH

2011 ($ BILLIONS) 81

Current Consensus on the Technology Industry 81

Growth Should Be Larger Than Planned, Per Most

Industry Economists 82

Long Term Look at the Economy and Microelectronic

Products 83

TABLE 29 ECONOMIC ASSUMPTIONS FOR THE FUTURE GROWTH

OF SEMICONDUCTORS AND PVD EQUIPMENT 83

GLOBAL INDUSTRY SUPPORT FOR MICROELECTRONICS 84

SEMI 84

Globalization 84

Standards 84

How SEMI Serves Its Members 85

TABLE 30 THE PURPOSE OF THE SEMI ORGANIZATION 85

SEMATECH 85

What They Do 86

International Technology Roadmap for Semiconductors

(ITRS) 86

The Semiconductor Industry Association 86

TABLE 31 CHALLENGES FACING THE SIA 87

THE EFFECTIVENESS OF PVD TECHNOLOGY 87

The Challenge of Technology 88

GLOBAL ENVIRONMENT 88

TABLE 32 ESTIMATED GLOBAL FABRICATION CAPACITY, 2011 (%) 88

MICROELECTRONICS COMPETITIVE GROWTH FACTORS 89

Global Economy is Current Driving Force for PVD 90

Impact of Market Growth Factors 90

TABLE 33 IMPACT OF MAJOR COMPETITIVE FACTORS ON THE

GROWTH OF PVD IN THE MICROELECTRONICS INDUSTRY (%) 90

SEMICONDUCTOR APPLICATIONS 91

TABLE 34 BASIC SEMICONDUCTOR APPLICATIONS DONE BY PVD 91

SEMICONDUCTOR METALLURGY 91

DEPOSITION OF THIN FILMS 92

Gate Dielectrics 93

TABLE 35 DESIRED DIELECTRIC PROPERTIES FOR

MICROELECTRONIC PRODUCTS 93

Interconnects 94

Barrier Layers 94

Contacts and Adhesion Layers 95

TYPES OF PVD SYSTEMS 95

TABLE 36 IMPACT ON PVD SYSTEMS BY CHANGES IN

SEMICONDUCTOR APPLICATIONS 96

Combined Functions 96

ADVANTAGES OF PVD IN SEMICONDUCTOR

FABRICATION 97

TABLE 37 ADVANTAGES OF PVD IN SEMICONDUCTOR

FABRICATION 97

PVD System Capabilities for Semiconductors 98

MAJOR MATERIALS USED IN PVD FOR SEMICONDUCTOR

PRODUCTS 98

TABLE 38 KEY MATERIALS DEPOSITED BY PVD FOR

SEMICONDUCTOR FABRICATION 99

Sputtering Targets 99

New Materials 100

SEMICONDUCTOR MARKET DRIVERS AND TRENDS 100

PVD EQUIPMENT DEMAND 101

TABLE 39 PVD FUNCTIONS VERSUS OTHER TECHNOLOGIES IN

SEMICONDUCTOR FABRICATION 101

CMOS Business Model 102

PVD and Industry Growth Trends 102

TABLE 40 GLOBAL GROWTH TREND OF PVD FOR

SEMICONDUCTORS, THROUGH 2011 (VALUE AND PERCENTAGE

RATIO) 103

OTHER MICROELECTRONIC APPLICATIONS 104

FLAT-PANEL DISPLAYS 104

ELECTRONIC COMPONENTS 105

MEMS Manufacturing 105

Mobile Devices 105

TABLE 41 OVERVIEW OF OTHER MICROELECTRONICS PVD

PRODUCTS AND APPLICATIONS 106

ADVANTAGES OF PVD FOR OTHER MICROELECTRONIC

APPLICATIONS 106

TABLE 42 ADVANTAGES OF PVD FOR OTHER MICROELECTRONIC

PRODUCTS 106

KEY MATERIALS USED IN OTHER MICROELECTRONIC

PRODUCTS 107

TABLE 43 KEY MATERIALS USED IN OTHER MICROELECTRONIC

PRODUCTS 107

MARKET DRIVERS FOR OTHER MICROELECTRONIC

PRODUCTS 107

PVD Demand 107

FORECAST ASSUMPTIONS—PVD IN MICROELECTRONICS 108

TABLE 44 FORECAST ASSUMPTIONS—PVD GROWTH IN

MICROELECTRONICS 109

TABLE 45 PROJECTED GLOBAL GROWTH TREND OF PVD FOR

SEMICONDUCTORS, THROUGH 2016 110

FORECAST—VALUE OF PVD EQUIPMENT SHIPMENTS 110

TABLE 46 FORECAST –VALUE OF GLOBAL SHIPMENTS OF PVD

EQUIPMENT FOR MICROELECTRONICS, THROUGH 2016 ($

MILLIONS) 111